Statistics
Publications
1
Citations
21
H-Index
1
Active since
2003
Affiliations
Applied Materials (United States)(Current)
D.G. Armour is an author at Applied Materials (United States) specializing in damage accumulation, surface passivation, and materials engineering.
Publications per year
2003–2003
1
1
Damage accumulation and dopant migration during shallow As and Sb implantation into Si
M. Werner, D.G. Armour, W VANDERVORST et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 21 citations · Full text
Engineering, Electrical Engineering, Materials Engineering +12
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