Concepedia

Ming-Shu Kuo

MK

Statistics

Publications

4

Citations

126

H-Index

4

Active since

2006

Affiliations

University of Maryland, College Park(Current)

Construction Technologies Institute

Texas Instruments (United States)

Ming-Shu Kuo is an author at University of Maryland, College Park specializing in materials science, engineering, and materials engineering.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceOptical PropertiesChemical EngineeringMaterials EngineeringMaterial CharacterizationPhysicsChemistry

Publications per year

2006–2010

4

Publications

4

Damage of ultralow k materials during photoresist mask stripping process

Xuefeng Hua, Ming-Shu Kuo, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 66 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Real-time studies of surface roughness development and reticulation mechanism of advanced photoresist materials during plasma processing

Arup R. Pal, Robert L. Bruce, F. Weilnboeck et al. · Journal of Applied Physics · 2009 · 23 citations

Optical Materials, Engineering, Electron-beam Lithography +24

Influence of C4F8/Ar-based etching and H2-based remote plasma ashing processes on ultralow k materials modifications

Ming-Shu Kuo, Xuefeng Hua, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 19 citations

Engineering, Plasma Combustion, Vacuum Device +16

Mechanistic study of ultralow k-compatible carbon dioxide <i>in situ</i> photoresist ashing processes. I. Process performance and influence on ULK material modification

Ming-Shu Kuo, Arup R. Pal, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 18 citations

1–4 of 4