Concepedia

Ming-Shu Kuo

MK

Statistics

Publications

4

Citations

126

H-Index

4

Active since

2006

Affiliations

University of Maryland, College Park(Current)

Construction Technologies Institute

Texas Instruments (United States)

Ming-Shu Kuo is an author at University of Maryland, College Park specializing in materials science, natural sciences, and surface science.

Publications per year

2006–2010

4

Publications

4

Damage of ultralow k materials during photoresist mask stripping process

Xuefeng Hua, Ming-Shu Kuo, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 66 citations

, , +17

Real-time studies of surface roughness development and reticulation mechanism of advanced photoresist materials during plasma processing

Arup R. Pal, Robert L. Bruce, F. Weilnboeck et al. · Journal of Applied Physics · 2009 · 23 citations

, , +17

Influence of C4F8/Ar-based etching and H2-based remote plasma ashing processes on ultralow k materials modifications

Ming-Shu Kuo, Xuefeng Hua, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 19 citations

, , +13

Mechanistic study of ultralow k-compatible carbon dioxide <i>in situ</i> photoresist ashing processes. I. Process performance and influence on ULK material modification

Ming-Shu Kuo, Arup R. Pal, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 18 citations

, , +14

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