16
Publications
437
Citations
13
H-Index
1980
Active since
Jürgen Probst is an author at Helmholtz-Zentrum Berlin für Materialien und Energie specializing in engineering, applied physics, and physics.
Top concepts
EngineeringApplied PhysicsPhysicsChemistryMaterial ScienceNatural SciencesOptical PropertiesX-ray SpectroscopySpectroscopyCrystallography
Publications per year
1980–2021
16
16
Metrology of nanoscale grating structures by UV scatterometry
M. Wurm, Johannes Endres, Jürgen Probst et al. · Optics Express · 2017 · 39 citations · Full text
Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams
Mika Pflüger, Victor Soltwisch, Jürgen Probst et al. · IUCrJ · 2017 · 34 citations · Full text
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