Analía Fernández Herrero

Publications

Citations

H-Index

2017

Active since

Affiliations

Physikalisch-Technische Bundesanstalt(Current)

Helmholtz-Zentrum Berlin für Materialien und Energie

Analía Fernández Herrero is an author at Physikalisch-Technische Bundesanstalt specializing in computational geometry, geometric modeling, and nanotechnology.

ORCID

Top concepts

PhysicsEngineeringNanotechnologyApplied PhysicsMaterial ScienceNatural SciencesGeometry ModelingComputer-aided DesignComputational GeometryComputational Electromagnetics

Publications per year

2017–2022

Publications

Reconstructing detailed line profiles of lamellar gratings from GISAXS patterns with a Maxwell solver

Victor Soltwisch, Analía Fernández Herrero, Mika Pflüger et al. · Journal of Applied Crystallography · 2017 · 35 citations · Full text

Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Analía Fernández Herrero, Mika Pflüger, Jana Puls et al. · Optics Express · 2021 · 18 citations · Full text

X-ray Spectroscopy, Engineering, Complex 3D +24

Analysis of Line-Edge Roughness Using EUV Scatterometry

Analía Fernández Herrero, Frank Scholze, Gaoliang Dai et al. · Nanomanufacturing and Metrology · 2022 · 14 citations · Full text

Engineering, Measurement, Electron Diffraction +24

Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering

Mika Pflüger, R. Joseph Kline, Analía Fernández Herrero et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2020 · 11 citations · Full text

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