Nanomanufacturing and Metrology

Promising Lithography Techniques for Next-Generation Logic Devices

Rashed Md. Murad Hasan, Xichun Luo · 2018 · 150 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +13

Advances in Atomic Layer Deposition

Jingming Zhang, Yicheng Li, Kun Cao et al. · 2022 · 143 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Femtosecond Laser Micro/Nano-manufacturing: Theories, Measurements, Methods, and Applications

Baoshan Guo, Jingya Sun, Yanhong Hua et al. · 2020 · 112 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Recent Advances in Micro/Nano-cutting: Effect of Tool Edge and Material Properties

Fengzhou Fang, Feifei Xu · 2018 · 111 citations

Engineering, Manufacturing Engineering, Materials Science +15

Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology

Yuki Shimizu · 2021 · 90 citations · Full text

Engineering, Manufacturing Engineering, Metrology +11