Jana Puls

Status of EUV reflectometry at PTB

Christian Laubis, Annett Barboutis, Martin Biel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 27 citations

Short Wavelength Optic, Engineering, Optical Testing +21

Characterization of the polarization properties of PTB's EUV reflectometry system

Christian Laubis, Annett Kampe, Christian Buchholz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 20 citations

Optical Materials, Engineering, Optical Testing +17

Bio-assay based on single molecule fluorescence detection in microfluidic channels

Christopher W. Hollars, Jana Puls, Olgica Bakajin et al. · Analytical and Bioanalytical Chemistry · 2006 · 18 citations

Engineering, Biosensing Systems, Biomedical Diagnostics +9

Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

Analía Fernández Herrero, Mika Pflüger, Jana Puls et al. · Optics Express · 2021 · 18 citations · Full text

X-ray Spectroscopy, Engineering, Complex 3D +24

High-accuracy EUV reflectometry at large optical components and oblique incidence

Christian Laubis, Frank Scholze, Christian Buchholz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 15 citations

Engineering, Electron-beam Lithography, Measurement +20