Concepedia

Annett Kampe

AK

2

Publications

35

Citations

2

H-Index

2009

Active since

Affiliations

Physikalisch-Technische Bundesanstalt(Current)

Annett Kampe is an author at Physikalisch-Technische Bundesanstalt specializing in applied physics, calibration, and engineering.

Top concepts

PhysicsCalibrationEngineeringApplied PhysicsInstrumentationOptical MetrologyOptical PropertiesPhotonic MetrologyOptical System AnalysisEducation

Publications per year

2009–2010

2

Publications

2

Characterization of the polarization properties of PTB's EUV reflectometry system

Christian Laubis, Annett Kampe, Christian Buchholz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 20 citations

Optical Materials, Engineering, Optical Testing +17

High-accuracy EUV reflectometry at large optical components and oblique incidence

Christian Laubis, Frank Scholze, Christian Buchholz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 15 citations

Engineering, Electron-beam Lithography, Measurement +20

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