10
Publications
501
Citations
10
H-Index
2010
Active since
Max Schoengen is an author at Helmholtz-Zentrum Berlin für Materialien und Energie specializing in materials science, engineering, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsNanofabricationOptical MaterialsOptical PropertiesPhysicsPhotonicsMicroscopyNanophotonics
Publications per year
2010–2017
10
10
Metrology of nanoscale grating structures by UV scatterometry
M. Wurm, Johannes Endres, Jürgen Probst et al. · Optics Express · 2017 · 39 citations · Full text
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