Statistics
Publications
19
Citations
592
H-Index
14
Active since
1976
Affiliations
Christopher P. Ausschnitt is an author at IBM (United States) specializing in engineering, manufacturing engineering, and natural sciences.
Publications per year
1976–2013
19
19
Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
Timothy A. Brunner, Vinayan C. Menon, Cheuk Wun Wong et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 47 citations · Full text
Engineering, Manufacturing Engineering, Manufacturing Processes +13
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