Daohuan Feng

Statistics

Publications

Citations

118

H-Index

Active since

2020

Affiliations

University of Chinese Academy of Sciences(Current)

Shanghai Institute of Microsystem and Information Technology

Chinese Academy of Sciences

Daohuan Feng is an author at University of Chinese Academy of Sciences specializing in materials engineering, mechanical polishing, and materials processing.

ORCID

Publications per year

2020–2023

Publications

Review on modeling and application of chemical mechanical polishing

Zhao Gaoyang, Zhen Wei, Weilei Wang et al. · Nanotechnology Reviews · 2020 · 76 citations · Full text

Engineering, Manufacturing Engineering, Materials Engineering +13

Investigation of Effect of L-Aspartic Acid and H2O2 for Cobalt Chemical Mechanical Polishing

Aoxue Xu, Weili Liu, Zhao Gaoyang et al. · ECS Journal of Solid State Science and Technology · 2020 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of Particle Size and pH Value of Slurry on Chemical Mechanical Polishing of SiO 2 Film

Fan Xu, Weilei Wang, Aoxue Xu et al. · ECS Journal of Solid State Science and Technology · 2022 · 16 citations

Engineering, Materials Engineering, Materials Science +13

Vertical Channel Transistor (VCT) as Access Transistor for Future 4F2 DRAM Architecture

Daohuan Feng, Yi Jiang, Yunsong Qiu et al. · 2023 · 10 citations

Engineering, Computer Engineering, Electrical Engineering +14

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