Concepedia
1
Publications
14
Citations
H-Index
2022
Active since
Affiliations
University of Chinese Academy of Sciences(Current)
Fan Xu is an author at University of Chinese Academy of Sciences.
Publications per year
2022–2022
Effect of Particle Size and pH Value of Slurry on Chemical Mechanical Polishing of SiO <sub>2</sub> Film
Fan Xu, Weilei Wang, Aoxue Xu et al. · ECS Journal of Solid State Science and Technology · 2022 · 14 citations
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