Concepedia

Aoxue Xu

AX

4

Publications

108

Citations

4

H-Index

2020

Active since

Affiliations

Shanghai Institute of Microsystem and Information Technology(Current)

University of Chinese Academy of Sciences

Chinese Academy of Sciences

Aoxue Xu is an author at Shanghai Institute of Microsystem and Information Technology specializing in engineering, corrosion, and materials science.

Top concepts

CorrosionEngineeringMaterial ScienceChemistrySurface ScienceElectrochemistrySurface PolishingMaterial ProcessingChemical EngineeringMechanical Engineering

Publications per year

2020–2022

4

Publications

4

Review on modeling and application of chemical mechanical polishing

Zhao Gaoyang, Zhen Wei, Weilei Wang et al. · Nanotechnology Reviews · 2020 · 67 citations · Full text

Engineering, Mechanical Engineering, Integrated Circuits +19

Investigation of Effect of L-Aspartic Acid and H<sub>2</sub>O<sub>2</sub> for Cobalt Chemical Mechanical Polishing

Aoxue Xu, Weili Liu, Zhao Gaoyang et al. · ECS Journal of Solid State Science and Technology · 2020 · 14 citations

Engineering, Mechanical Engineering, Chemistry +21

Effect of Particle Size and pH Value of Slurry on Chemical Mechanical Polishing of SiO <sub>2</sub> Film

Fan Xu, Weilei Wang, Aoxue Xu et al. · ECS Journal of Solid State Science and Technology · 2022 · 14 citations

Effect of Diethanolamine as Corrosion Inhibitor for the Chemical Mechanical Polishing of Cobalt in H<sub>2</sub>O<sub>2</sub> Based Slurry

Aoxue Xu, Fan Xu, Weilei Wang et al. · ECS Journal of Solid State Science and Technology · 2021 · 13 citations

Materials Science, Chemical Engineering, Afm Image +15

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