Weilei Wang

Publications

190

Citations

H-Index

2017

Active since

Affiliations

Shanghai Institute of Microsystem and Information Technology(Current)

University of Chinese Academy of Sciences

Chinese Academy of Sciences

Weilei Wang is an author at Shanghai Institute of Microsystem and Information Technology specializing in materials science, engineering, and corrosion.

ORCID

Top concepts

EngineeringMaterial ScienceChemistryCorrosionSurface ScienceElectrochemistrySurface PolishingMaterial ProcessingChemical EngineeringMechanical Engineering

Publications per year

2017–2024

Publications

Review on modeling and application of chemical mechanical polishing

Zhao Gaoyang, Zhen Wei, Weilei Wang et al. · Nanotechnology Reviews · 2020 · 67 citations · Full text

Engineering, Mechanical Engineering, Integrated Circuits +19

Two-Step Chemical Mechanical Polishing of 4H-SiC (0001) Wafer

Weilei Wang, Weili Liu, Zhitang Song · ECS Journal of Solid State Science and Technology · 2021 · 35 citations

A facile one-step approach to superhydrophilic silica film with hierarchical structure using fluoroalkylsilane

Yuxiang Liu, Weili Liu, Guangling Wang et al. · Colloids and Surfaces A Physicochemical and Engineering Aspects · 2017 · 17 citations

Materials Science, Hierarchical Structure, Self-cleaning Surface +9

Polishing Mechanism of CMP 4H-SiC Crystal Substrate (0001) Si Surface Based on an Alumina (Al2O3) Abrasive

Juntao Gong, Weilei Wang, Weili Liu et al. · Materials · 2024 · 17 citations · Full text

Investigation of Effect of L-Aspartic Acid and H<sub>2</sub>O<sub>2</sub> for Cobalt Chemical Mechanical Polishing

Aoxue Xu, Weili Liu, Zhao Gaoyang et al. · ECS Journal of Solid State Science and Technology · 2020 · 14 citations

Engineering, Mechanical Engineering, Chemistry +21

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