Concepedia

Yoshio Yanase

YY

7

Publications

212

Citations

7

H-Index

1994

Active since

Affiliations

Sumco Corporation (Japan)(Current)

Yoshio Yanase is an author at Sumco Corporation (Japan) specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceCrystalline DefectsPhysicsMicroscopyNanotechnologyMicrostructureCrystallography

Publications per year

1994–1999

7

Publications

7

Microstructure Observation of “Crystal-Originated Particles” on Silicon Wafers

Morimasa Miyazaki, Sumio Miyazaki, Yoshio Yanase et al. · Japanese Journal of Applied Physics · 1995 · 48 citations

Engineering, Microscopy, Microstructure Shape +19

Development of ultrahigh vacuum-atomic force microscopy with frequency modulation detection and its application to electrostatic force measurement

Takayuki Uchihashi, Yasuhiro Sugawara, Yoshio Yanase et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 37 citations

Engineering, Microscopy, Electrostatic Force +20

Influence of Crystal-Originated “Particle” Microstructure on Silicon Wafers on Gate Oxide Integrity

Morimasa Miyazaki, Sumio Miyazaki, Takafumi Kitamura et al. · Japanese Journal of Applied Physics · 1997 · 37 citations

Materials Science, Silicon Wafers, Cop Microstructure +13

Formation of Grown-in Defects during Czochralski Silicon Crystal Growth

Hideshi Nishikawa, Tadami Tanaka, Yoshio Yanase et al. · Japanese Journal of Applied Physics · 1997 · 31 citations

Materials Science, Semiconductors, Formation Behavior +13

Atomic Force Microscopy Observation of Si(100) Surface after Hydrogen Annealing

Yoshio Yanase, Hiroshi Horie, Yoshio Oka et al. · Journal of The Electrochemical Society · 1994 · 24 citations

Engineering, Microscopy, Silicon On Insulator +16

Rows per page

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