Concepedia

Sumio Miyazaki

SM

3

Publications

100

Citations

3

H-Index

1995

Active since

Affiliations

Sumco Corporation (Japan)(Current)

Sumio Miyazaki is an author at Sumco Corporation (Japan) specializing in applied physics, crystalline defects, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceCrystalline DefectsSurface ScienceChemistryMicroscopyMicrostructureNanotechnologyCrystallography

Publications per year

1995–1997

3

Publications

3

Microstructure Observation of “Crystal-Originated Particles” on Silicon Wafers

Morimasa Miyazaki, Sumio Miyazaki, Yoshio Yanase et al. · Japanese Journal of Applied Physics · 1995 · 48 citations

Engineering, Microscopy, Microstructure Shape +19

Influence of Crystal-Originated “Particle” Microstructure on Silicon Wafers on Gate Oxide Integrity

Morimasa Miyazaki, Sumio Miyazaki, Takafumi Kitamura et al. · Japanese Journal of Applied Physics · 1997 · 37 citations

Materials Science, Silicon Wafers, Cop Microstructure +13

Influence of Fe Contamination in Czochralski-Grown Silicon Single Crystals on LSI-Yield Related Crystal Quality Characteristics

Morimasa Miyazaki, Sumio Miyazaki, Takafumi Kitamura et al. · Japanese Journal of Applied Physics · 1995 · 15 citations

Materials Engineering, Materials Science, Electrical Engineering +14

Rows per page

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