Concepedia
Statistics
Publications
34
Citations
1K
H-Index
20
Active since
1970
Affiliations
NEC (Japan)(Current)
Sumco Corporation (Japan)
North Carolina State University
Sumitomo Electric Industries (Japan)
Nippon Electric Glass (Japan)
Hideki Tsuya is an author at NEC (Japan) specializing in semiconductor materials, materials science, and silicon materials.
Publications per year
1970–2004
Precipitation and redistribution of oxygen in Czochralski-grown silicon
Fumio Shimura, Hideki Tsuya, T. Kawamura · Applied Physics Letters · 1980 · 88 citations
Natural Sciences, Materials Engineering, Materials Science +17
Surface- and inner-microdefects in annealed silicon wafer containing oxygen
Fumio Shimura, Hideki Tsuya, T. Kawamura · Journal of Applied Physics · 1980 · 78 citations
Selective Silicon Epitaxy Using Reduced Pressure Technique
Kohetsu Tanno, Nobuhiro Endo, Hiroshi Kitajima et al. · Japanese Journal of Applied Physics · 1982 · 66 citations
Engineering, Materials Engineering, Materials Science +16
Advanced Techniques to Decrease Defect Density in Molecular Beam Epitaxial Silicon Films
Toru Tatsumi, Naoaki Aizaki, Hideki Tsuya · Japanese Journal of Applied Physics · 1985 · 64 citations
Engineering, Materials Engineering, Materials Science +17
Thermally Induced Defect Behavior and Effective Intrinsic Gettering Sink in Silicon Wafers
Fumio Shimura, Hideki Tsuya, T. Kawamura · Journal of The Electrochemical Society · 1981 · 53 citations · Full text
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