K. Williams

The behaviour of perfluoropolyether and other vacuum fluids under ion and electron bombardment

L. Holland, L Laurenson, R.E. Hurley et al. · Nuclear Instruments and Methods · 1973 · 42 citations

Engineering, Physics, Natural Sciences +8

High resolution patterning system with a single bore objective lens

Thomas H. Newman, K. Williams, R. F. W. Pease · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 39 citations

High Resolution, Engineering, Electron-beam Lithography +27

Laterally seeded regrowth of silicon over SiO2 through strip electron beam irradiation

Yoshinori Hayafuji, T. Yanada, S. Usui et al. · Applied Physics Letters · 1983 · 33 citations

Si Films, Engineering, Sio2 Islands +16

Patterning of wave guides in LiNbO3 using ion beam etching and reactive ion beam etching

Danielle Hines, K. Williams · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 23 citations · Full text

Photonics, Engineering, Electron-beam Lithography +15

Ion beam deposition of diamond-like carbon from an r.f. inductively coupled CH4-plasma source

B. Druz, Salvatore Distefano, A. Hayes et al. · Surface and Coatings Technology · 1996 · 12 citations

Diamond-like Carbon, Ion Beam Deposition, Coupled Ch4-plasma Source +5