Ion beam deposition of diamond-like carbon from an r.f. inductively coupled CH4-plasma source - Concepedia

Concepedia

Publication | Closed Access

Ion beam deposition of diamond-like carbon from an r.f. inductively coupled CH4-plasma source

12

Citations

8

References

1996

Year

B. Druz, Salvatore Distefano, A. Hayes, E. Ostan, K. Williams, L. Wang

Surface and Coatings Technology

Diamond-like CarbonIon Beam DepositionCoupled Ch4-plasma SourceApplied PhysicsIon BeamChemistryIon EmissionPlasma Processing

References

	Year	Citations

Page 1