Concepedia

A. Mitwalsky

AM

10

Publications

323

Citations

10

H-Index

1990

Active since

Affiliations

Siemens (Germany)(Current)

IMEC

A. Mitwalsky is an author at Siemens (Germany) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsThin FilmsMaterials EngineeringSurface ScienceSemiconductorsMicroelectronicsSurface TechnologyCrystalline Defects

Publications per year

1990–2003

10

Publications

10

Microstructure and etching properties of sputtered indium—tin oxide (ITO)

M. Hoheisel, A. Mitwalsky, C. Mrotzek · physica status solidi (a) · 1991 · 60 citations

Optical Materials, Engineering, Sputtered Indium—tin Oxide +19

WSi2 and CoSi2 as diffusion sources for shallow-junction formation in silicon

V. Probst, H. Schaber, A. Mitwalsky et al. · Journal of Applied Physics · 1991 · 58 citations

Materials Science, Semiconductors, Semiconductor Technology +15

Metal-dopant-compound formation in TiSi2 and TaSi2: Impact on dopant diffusion and contact resistance

V. Probst, H. Schaber, A. Mitwalsky et al. · Journal of Applied Physics · 1991 · 48 citations

Metal-dopant-compound Formation, Engineering, Chemistry +18

Deposition, annealing and characterisation of high‐dielectric‐constant metal oxide films

H. Treichel, A. Mitwalsky, G. Tempel et al. · Advanced Materials for Optics and Electronics · 1995 · 28 citations

Materials Engineering, Materials Science, Abstract Flims +13

Low‐Pressure chemical vapour deposition of tantalum pentoxide films for ulsi devices using tantalum pentaethoxide as precursor

H. Treichel, A. Mitwalsky, Nathan P. Sandler et al. · Advanced Materials for Optics and Electronics · 1992 · 26 citations

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