Concepedia

H. Treichel

HT

8

Publications

316

Citations

8

H-Index

1989

Active since

Affiliations

Siemens (Germany)(Current)

H. Treichel is an author at Siemens (Germany) specializing in materials science, engineering, and materials engineering.

Top concepts

EngineeringMaterial ScienceApplied PhysicsMaterials EngineeringThin FilmsDielectricsSurface ScienceElectronic MaterialsElectrical InsulationElectrical Engineering

Publications per year

1989–2001

8

Publications

8

Low dielectric constant materials for interlayer dielectric

H. Treichel, G. Ruhl, P. Ansmann et al. · Microelectronic Engineering · 1998 · 105 citations

Materials Engineering, Materials Science, Dielectrics +6

Low dielectric constant materials

H. Treichel · Journal of Electronic Materials · 2001 · 62 citations

Materials Science, Materials Engineering, Dielectrics +7

Plasma‐Assisted Chemical Vapor Deposition and Characterization of Boron Nitride Films

S. V. Nguyen, Tùng Lâm Nguyễn, H. Treichel et al. · Journal of The Electrochemical Society · 1994 · 53 citations

Materials Science, Semiconductors, Electrical Engineering +13

Deposition, annealing and characterisation of high‐dielectric‐constant metal oxide films

H. Treichel, A. Mitwalsky, G. Tempel et al. · Advanced Materials for Optics and Electronics · 1995 · 28 citations

Materials Engineering, Materials Science, Abstract Flims +13

Low‐Pressure chemical vapour deposition of tantalum pentoxide films for ulsi devices using tantalum pentaethoxide as precursor

H. Treichel, A. Mitwalsky, Nathan P. Sandler et al. · Advanced Materials for Optics and Electronics · 1992 · 26 citations

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