Concepedia
Statistics
Publications
2
Citations
113
H-Index
Active since
1992
Affiliations
Massachusetts Institute of Technology(Current)
C. G. Chen is an author at Massachusetts Institute of Technology specializing in engineering, silicon, and silicon wafers.
Publications per year
1992–2002
Investigation of silicon wafering by wire EDM
Yuxuan Luo, C. G. Chen, Zheming Tong · Journal of Materials Science · 1992 · 70 citations
Engineering, Manufacturing Engineering, Materials Science +14
Generalized scanning beam interference lithography system for patterning gratings with variable period progressions
G. S. Pati, Ralf K. Heilmann, Paul T. Konkola et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 43 citations
Engineering, Electrical Engineering, Microfabrication +7
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