Concepedia

Thuc Dam

TD

Statistics

Publications

11

Citations

274

H-Index

11

Active since

1999

Affiliations

Luminex (United States)(Current)

Nikon (United States)

The University of Texas at Dallas

Thuc Dam is an author at Luminex (United States) specializing in engineering, inverse lithography technology, and mask design.

Publications per year

1999–2010

11

Publications

11

A pH-sensitive nanotip array imaging sensor

Ying-Hong Liu, Thuc Dam, Paul Pantano · Analytica Chimica Acta · 2000 · 51 citations

Engineering, Bioengineering, Materials Science +12

Toward a consistent and accurate approach to modeling projection optics

Danping Peng, Peter Hu, Vikram Tolani et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 43 citations

Natural Sciences, Computational Engineering, Digital Imaging +8

Considering MEEF in inverse lithography technology (ILT) and source mask optimization (SMO)

Linyong Pang, Guangming Xiao, Vikram Tolani et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 34 citations

Engineering, Computer Engineering, Design Optimization +13

Validation of inverse lithography technology (ILT) and its adaptive SRAF at advanced technology nodes

Linyong Pang, Grace Dai, Tom Cecil et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 33 citations

Engineering, Computer Engineering, Electrical Engineering +12

Inverse lithography technology (ILT): keep the balance between SRAF and MRC at 45 and 32 nm

Linyong Pang, Yong Liu, Thuc Dam et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 22 citations

Engineering, Manufacturing Engineering, Design Automation +14

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