Concepedia
Statistics
Publications
3
Citations
58
H-Index
Active since
2003
Affiliations
STMicroelectronics (France)(Current)
Philips (France)
STMicroelectronics (Switzerland)
Laboratoire d'Électronique des Technologies de l'Information
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Yves Rody is an author at STMicroelectronics (France) specializing in engineering, optoelectronics, and electrical engineering.
Publications per year
2003–2005
Improving model-based OPC performance for the 65-nm node through calibration set optimization
Kyle Patterson, Yorick Trouiller, Kevin Lucas et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 29 citations
Engineering, Electrical Engineering, Materials Science +10
Validated 90nm CMOS technology platform with low-k copper interconnects for advanced system-on-chip (SoC)
T. Devoivre, M.M. Lunenborg, C. Julien et al. · 2003 · 16 citations
Engineering, Computer Engineering, Electrical Engineering +17
High accuracy 65nm OPC verification: full process window model vs. critical failure ORC
Amandine Borjon, Jérôme Belledent, Shumay Shang et al. · Optical Microlithography XVIII · 2005 · 13 citations
Engineering, Manufacturing Engineering, Digital Fabrication +12
1–3 of 3