16
Publications
989
Citations
13
H-Index
1981
Active since
R. Boudreau is an author at EIC Laboratories specializing in engineering, electrical engineering, and microelectronics.
Top concepts
EngineeringElectrical EngineeringMaterial ScienceMicroelectronicsChemistryPhotonicsApplied PhysicsOptoelectronicsSurface ScienceMicrofabrication
Publications per year
1981–2010
16
16
Mechanisms of etch hillock formation
Song-Sheng Tan, Michael L. Reed, Hongtao Han et al. · Journal of Microelectromechanical Systems · 1996 · 42 citations
Rows per page
1–5 of 16