Song-Sheng Tan

Mechanisms of etch hillock formation

Song-Sheng Tan, Michael L. Reed, Hongtao Han et al. · Journal of Microelectromechanical Systems · 1996 · 42 citations

Engineering, Silicon On Insulator, Anisotropic Etching +16

Morphology of etch hillock defects created during anisotropic etching of silicon

Song-Sheng Tan, Michael L. Reed, Hongtao Han et al. · Journal of Micromechanics and Microengineering · 1994 · 41 citations

Engineering, Silicon On Insulator, Etch Hillocks +16

Evolution of hillocks during silicon etching in TMAH

John T. L. Thong, P. Luo, W. K. Choi et al. · Journal of Micromechanics and Microengineering · 2000 · 25 citations

Consideration of the frequency performance potential of GaAs homojunction and heterojunction n-p-n transistors

Song-Sheng Tan, A. G. Milnes · IEEE Transactions on Electron Devices · 1983 · 14 citations

Electrical Engineering, Engineering, High-frequency Device +10