Concepedia

Yuan Lu

YL

18

Publications

792

Citations

16

H-Index

2011

Active since

Affiliations

University of Freiburg(Current)

Fraunhofer Institute for Applied Solid State Physics

Utah State University

Shanghai Institute of Microsystem and Information Technology

ShanghaiTech University

Yuan Lu is an author at University of Freiburg specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsMicrofabricationElectrical EngineeringMechanical EngineeringUltrasoundMicrostructureSurface Science

Publications per year

2011–2022

18

Publications

18

Elastic modulus and coefficient of thermal expansion of piezoelectric Al<sub>1−x</sub>Sc<sub>x</sub>N (up to x = 0.41) thin films

Yuan Lu, Markus Reusch, Nicolas Kurz et al. · APL Materials · 2018 · 118 citations · Full text

Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators

Nicolas Kurz, Anli Ding, Daniel F. Urban et al. · Journal of Applied Physics · 2019 · 98 citations

Aluminium Nitride, Engineering, Piezoelectric Coefficient +16

Optical constants and band gap of wurtzite Al1−xScxN/Al2O3 prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41

M. Baeumler, Yuan Lu, Nicolas Kurz et al. · Journal of Applied Physics · 2019 · 90 citations · Full text

Materials Science, Ii-vi Semiconductor, Wurtzite Al1−xscxn/al2o3 +13

Surface Morphology and Microstructure of Pulsed DC Magnetron Sputtered Piezoelectric AlN and AlScN Thin Films

Yuan Lu, Markus Reusch, Nicolas Kurz et al. · physica status solidi (a) · 2017 · 73 citations

Materials Science, Aluminium Nitride, Engineering +13

Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N 112¯ thin films

Anli Ding, Lutz Kirste, Yuan Lu et al. · Applied Physics Letters · 2020 · 48 citations · Full text

Materials Science, Aluminium Nitride, Electrical Engineering +11

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