Concepedia

Anli Ding

AD

6

Publications

359

Citations

6

H-Index

2017

Active since

Affiliations

Fraunhofer Institute for Applied Solid State Physics(Current)

University of Freiburg

Anli Ding is an author at Fraunhofer Institute for Applied Solid State Physics specializing in applied physics, materials science, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial ScienceThin FilmsMicrofabricationMicrostructureSurface ScienceElectrical EngineeringMechanical EngineeringPhysics

Publications per year

2017–2021

6

Publications

6

Elastic modulus and coefficient of thermal expansion of piezoelectric Al<sub>1−x</sub>Sc<sub>x</sub>N (up to x = 0.41) thin films

Yuan Lu, Markus Reusch, Nicolas Kurz et al. · APL Materials · 2018 · 118 citations · Full text

Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators

Nicolas Kurz, Anli Ding, Daniel F. Urban et al. · Journal of Applied Physics · 2019 · 98 citations

Aluminium Nitride, Engineering, Piezoelectric Coefficient +16

Surface Morphology and Microstructure of Pulsed DC Magnetron Sputtered Piezoelectric AlN and AlScN Thin Films

Yuan Lu, Markus Reusch, Nicolas Kurz et al. · physica status solidi (a) · 2017 · 73 citations

Materials Science, Aluminium Nitride, Engineering +13

Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N 112¯ thin films

Anli Ding, Lutz Kirste, Yuan Lu et al. · Applied Physics Letters · 2020 · 48 citations · Full text

Materials Science, Aluminium Nitride, Electrical Engineering +11

Investigation of Temperature Characteristics and Substrate Influence on AlScN-Based SAW Resonators

Anli Ding, Markus Reusch, Yuan Lu et al. · 2018 · 11 citations

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