Concepedia
Statistics
Publications
15
Citations
439
H-Index
13
Active since
2019
Affiliations
ShanghaiTech University(Current)
University of Chinese Academy of Sciences
Shanghai Institute of Microsystem and Information Technology
Yunnan University
Green Chemistry
Zhifang Luo is an author at ShanghaiTech University specializing in materials science, natural sciences, and materials engineering.
Publications per year
2019–2024
High Figure-of-Merit Lamb Wave Resonators Based on Al0.7Sc0.3N Thin Film
Shuai Shao, Zhifang Luo, Tao Wu · IEEE Electron Device Letters · 2021 · 71 citations
Natural Sciences, Materials Engineering, Materials Science +16
High Quality Co-Sputtering AlScN Thin Films for Piezoelectric Lamb-Wave Resonators
Shuai Shao, Zhifang Luo, Yuan Lu et al. · Journal of Microelectromechanical Systems · 2022 · 51 citations
Morphology- and Phase-Controlled Synthesis of Visible-Light-Activated S-doped TiO2 with Tunable S4+/S6+ Ratio
Liang Jiang, Zhifang Luo, Yizhou Li et al. · Chemical Engineering Journal · 2020 · 50 citations
Natural Sciences, Materials Engineering, Materials Science +13
Characterization of AlN and AlScN film ICP etching for micro/nano fabrication
Zhifang Luo, Shuai Shao, Tao Wu · Microelectronic Engineering · 2021 · 37 citations
Natural Sciences, Materials Engineering, Materials Science +14
Low Loss Al<sub>0.7</sub>Sc<sub>0.3</sub>N Thin Film Acoustic Delay Lines
Shuai Shao, Zhifang Luo, Yuan Lu et al. · IEEE Electron Device Letters · 2022 · 31 citations
Natural Sciences, Electrical Engineering, Materials Science +9
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