Statistics
Publications
11
Citations
774
H-Index
10
Active since
1996
Michael D. Goodner is an author at Intel (United States) specializing in natural sciences, polymer chemistry, and materials science.
Publications per year
1996–2010
11
11
Mechanistic study of plasma damage of low k dielectric surfaces
J. Bao, Hua‐Tian Shi, J. Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 102 citations
Natural Sciences, Materials Engineering, Materials Science +15
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