Concepedia

M. L. Green

ML

Statistics

Publications

10

Citations

491

H-Index

10

Active since

1985

Affiliations

AT&T (United States)(Current)

Nokia (United States)

M. L. Green is an author at AT&T (United States) specializing in materials science, materials engineering, and semiconductor materials.

Publications per year

1985–1995

10

Publications

10

Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films

M. L. Green, M. E. Gross, Letizia Papa et al. · Journal of The Electrochemical Society · 1985 · 234 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low Pressure Chemical Vapor Deposition of Tungsten and Aluminum for VLSI Applications

R. Lévy, M. L. Green · Journal of The Electrochemical Society · 1987 · 48 citations

Engineering, Materials Engineering, Materials Science +17

High-quality homoepitaxial silicon films deposited by rapid thermal chemical vapor deposition

M. L. Green, D. Brasen, H. S. Luftman et al. · Journal of Applied Physics · 1989 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +17

Elimination of dislocations in heteroepitaxial MBE and RTCVD Ge x Si1-x grown on patterned Si substrates

Eugene A. Fitzgerald, Ya Xie, D. Brasen et al. · Journal of Electronic Materials · 1990 · 35 citations

Engineering, Materials Engineering, Materials Science +15

Nitrogen content of oxynitride films on Si(100)

Hong Tang, W. N. Lennard, M. Zinke-Allmang et al. · Applied Physics Letters · 1994 · 34 citations

Natural Sciences, Chemistry, Materials Science +17

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