Souichi Katagiri

Imaging Characteristics of Multi-Phase-Shifting and Halftone Phase-Shifting Masks

Tsuneo Terasawa, Norio Hasegawa, Hiroshi Fukuda et al. · Japanese Journal of Applied Physics · 1991 · 78 citations

Natural Sciences, Radiology, Biomedical Optics +12

Stabilization of a tungsten ⟨310⟩ cold field emitter

Keigo Kasuya, Souichi Katagiri, Takashi Ohshima et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 44 citations

Engineering, Electrical Engineering, Materials Science +9

Monochromatic electron emission from CeB6 (310) cold field emitter

Keigo Kasuya, Toshiaki Kusunoki, Tomihiro Hashizume et al. · Applied Physics Letters · 2020 · 22 citations

Natural Sciences, Materials Science, Physics +13

Improved resolution of an <i>i</i>-line stepper using a phase-shifting mask

Tsuneo Terasawa, Norio Hasegawa, Toshihiko Tanaka et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 18 citations

Engineering, Manufacturing Engineering, Microfabrication +14