Concepedia

Tadatoshi Tomita

TT

Statistics

Publications

4

Citations

70

H-Index

4

Active since

2013

Affiliations

Tokyo Electron (Japan)(Current)

Tadatoshi Tomita is an author at Tokyo Electron (Japan) specializing in materials engineering, microfabrication, and engineering.

Publications per year

2013–2015

4

Publications

4

High-volume manufacturing equipment and processing for directed self-assembly applications

Mark Somervell, Takashi Yamauchi, Soichiro Okada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 22 citations

Engineering, Materials Engineering, Materials Science +11

Simulation analysis of directed self-assembly for hole multiplication in guide pattern

Makoto Muramatsu, Takehito Nakano, Tadatoshi Tomita et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations

Engineering, Materials Engineering, Materials Science +16

Dissipative particle dynamics study on directed self-assembly in holes

Takehito Nakano, Masaaki Matsukuma, Kentaro Matsuzaki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +14

Driving DSA into volume manufacturing

Mark Somervell, Takashi Yamauchi, Soichiro Okada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 14 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

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