Concepedia

Masaaki Matsukuma

MM

Statistics

Publications

5

Citations

107

H-Index

5

Active since

2003

Affiliations

Tokyo Electron (Japan)(Current)

Masaaki Matsukuma is an author at Tokyo Electron (Japan) specializing in natural sciences, plasma-surface interactions, and physics.

Publications per year

2003–2023

5

Publications

5

Spatiotemporal structure of low frequency waves in a magnetized plasma device

Masaaki Matsukuma, Th. Pierre, A. Escarguel et al. · Physics Letters A · 2003 · 33 citations

Natural Sciences, Physics, Electromagnetics +15

Multiscale plasma and feature profile simulations of plasma-enhanced chemical vapor deposition and atomic layer deposition processes for titanium thin film fabrication

Kazuki Denpoh, Paul Moroz, Taiki Kato et al. · Japanese Journal of Applied Physics · 2019 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code

Denis Eremin, Efe Kemaneci, Masaaki Matsukuma et al. · Plasma Sources Science and Technology · 2023 · 19 citations · Full text

Natural Sciences, Computational Engineering, Physics +14

Dissipative particle dynamics study on directed self-assembly in holes

Takehito Nakano, Masaaki Matsukuma, Kentaro Matsuzaki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +14

Experimental and numerical analysis of the effects of ion bombardment in silicon oxide (SiO <sub>2</sub> ) plasma enhanced atomic layer deposition (PEALD) processes

Hu Li, Tomoko Ito, Kazuhiro Karahashi et al. · Japanese Journal of Applied Physics · 2020 · 14 citations

Natural Sciences, Materials Science, Physics +17

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