Concepedia
1
Publications
23
Citations
H-Index
2019
Active since
Affiliations
Tokyo Electron (Japan)(Current)
Taiki Kato is an author at Tokyo Electron (Japan).
Publications per year
2019–2019
Multiscale plasma and feature profile simulations of plasma-enhanced chemical vapor deposition and atomic layer deposition processes for titanium thin film fabrication
Kazuki Denpoh, Paul Moroz, Taiki Kato et al. · Japanese Journal of Applied Physics · 2019 · 23 citations
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