Concepedia

Kazuki Denpoh

KD

15

Publications

472

Citations

12

H-Index

1998

Active since

Affiliations

Tokyo Electron (Japan)(Current)

Tohoku University

Muroran Institute of Technology

Kazuki Denpoh is an author at Tokyo Electron (Japan) specializing in engineering, physics, and applied physics.

Top concepts

EngineeringPhysicsApplied PhysicsElectrical EngineeringPlasma SimulationPlasma PhysicsAtomic PhysicsMicroelectronicsMagnetohydrodynamicsElectrical Insulation

Publications per year

1998–2020

15

Publications

15

Self-consistent particle simulation of radio-frequency CF4 discharge with implementation of all ion–neutral reactive collisions

Kazuki Denpoh, Kenichi Nanbu · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 117 citations

Engineering, Glow Discharge, Cf4 Radio-frequency Discharge +19

Self-Consistent Particle Simulation of Radio Frequency CF<sub>4</sub> Discharge: Effect of Gas Pressure

Kazuki Denpoh, Kenichi Nanbu · Japanese Journal of Applied Physics · 2000 · 76 citations

Engineering, Glow Discharge, Fluid Mechanics +17

Monte Carlo Collision Simulation of Positive-Negative Ion Recombination for a Given Rate Constant

Kenichi Nanbu, Kazuki Denpoh · Journal of the Physical Society of Japan · 1998 · 41 citations

Electrical Engineering, Nonequilibrium State, Engineering +14

Modeling of rarefied gas heat conduction between wafer and susceptor

Kazuki Denpoh · IEEE Transactions on Semiconductor Manufacturing · 1998 · 40 citations

Engineering, Thermal Conductivity, Refrigeration +21

Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled plasmas in argon

Kazuki Denpoh, Peter L. G. Ventzek · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2008 · 38 citations

Engineering, Plasma Physics, Ballistic Electrons +16

Rows per page

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