Concepedia

Tiffany Saldana

TS

2

Publications

74

Citations

2

H-Index

2017

Active since

Affiliations

Hitachi (Japan)(Current)

Tiffany Saldana is an author at Hitachi (Japan) specializing in applied physics, microfabrication, and engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationNanoelectronicsChemical EngineeringElectronic PackagingMaterials Engineering

Publications per year

2017–2017

2

Publications

2

Atomic layer etching of silicon nitride using cyclic process with hydrofluorocarbon chemistry

Yohei Ishii, Kazumasa Okuma, Tiffany Saldana et al. · Japanese Journal of Applied Physics · 2017 · 49 citations

Engineering, Atomic Layer Etching, Silicon On Insulator +16

Selective atomic-level etching using two heating procedures, infrared irradiation and ion bombardment, for next-generation semiconductor device manufacturing

Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi et al. · Journal of Physics D Applied Physics · 2017 · 25 citations

Engineering, Electron-beam Lithography, Target Fabrication +21

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