Kazumasa Okuma

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Active since

2017

Affiliations

Hitachi Global Storage Technologies (United States)(Current)

Hitachi (Japan)

Kazumasa Okuma is an author at Hitachi Global Storage Technologies (United States) specializing in materials engineering, engineering, and surface science.

Publications per year

2017–2018

Publications

Atomic layer etching of silicon nitride using cyclic process with hydrofluorocarbon chemistry

Yohei Ishii, Kazumasa Okuma, Tiffany Saldana et al. · Japanese Journal of Applied Physics · 2017 · 52 citations

Engineering, Materials Engineering, Materials Science +17

Anisotropic selective etching between SiGe and Si

Yohei Ishii, Ritchie Scott-McCabe, Kazumasa Okuma et al. · Japanese Journal of Applied Physics · 2018 · 19 citations · Full text

Engineering, Materials Engineering, Materials Science +17

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