Concepedia

Sanjana Das

SD

Statistics

Publications

3

Citations

147

H-Index

3

Active since

2013

Affiliations

Center for Nanoscale Science and Technology(Current)

University at Albany, State University of New York

Argonne National Laboratory

Sanjana Das is an author at Center for Nanoscale Science and Technology specializing in materials engineering, line roughness, and electronic materials.

ORCID

Publications per year

2013–2015

3

Publications

3

Secondary Electrons in EUV Lithography

Justin Torok, Ryan Del Re, Henry Herbol et al. · Journal of Photopolymer Science and Technology · 2013 · 108 citations · Full text

, , +9

Electron Penetration Depths in EUV Photoresists

Justin Torok, Bharath Srivats, Shahid Hussain Memon et al. · Journal of Photopolymer Science and Technology · 2014 · 22 citations · Full text

, , +14

Challenges and mitigation strategies for resist trim etch in resist-mandrel based SAQP integration scheme

Nihar Mohanty, Elliott Franke, Eric Liu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 17 citations

, , +16

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