Ruggero Anzalone

Statistics

Publications

Citations

826

H-Index

Active since

2007

Affiliations

Institute for Microelectronics and Microsystems(Current)

STMicroelectronics (Italy)

University of Catania

University of South Florida

Istituto Nazionale di Fisica Nucleare, Sezione di Catania

Ruggero Anzalone is an author at Institute for Microelectronics and Microsystems specializing in materials engineering, materials science, and silicon carbide (sic) materials.

Publications per year

2007–2023

Publications

From thin film to bulk 3C-SiC growth: Understanding the mechanism of defects reduction

Francesco La Via, Ruggero Anzalone, Corrado Bongiorno et al. · Materials Science in Semiconductor Processing · 2018 · 138 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Heteroepitaxy of 3C-SiC on different on-axis oriented silicon substrates

Ruggero Anzalone, Giuseppe D’Arrigo, Corrado Bongiorno et al. · Journal of Applied Physics · 2009 · 60 citations

Engineering, Materials Engineering, Materials Science +17

Advanced Residual Stress Analysis and FEM Simulation on Heteroepitaxial 3C–SiC for MEMS Application

Ruggero Anzalone, Giuseppe D’Arrigo, Massimo Camarda et al. · Journal of Microelectromechanical Systems · 2011 · 53 citations

Engineering, Materials Engineering, Materials Science +17

Structural defects in (100) 3C-SiC heteroepitaxy: Influence of the buffer layer morphology on generation and propagation of stacking faults and microtwins

Christopher L. Frewin, Corrado Bongiorno, Ruggero Anzalone et al. · Diamond and Related Materials · 2009 · 49 citations

Engineering, Materials Engineering, Materials Science +16

3C-SiC Film Growth on Si Substrates

Andrea Severino, Christopher Locke, Ruggero Anzalone et al. · ECS Transactions · 2011 · 44 citations

Engineering, Materials Engineering, Materials Science +17

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