Ruggero Anzalone

From thin film to bulk 3C-SiC growth: Understanding the mechanism of defects reduction

Francesco La Via, Ruggero Anzalone, Corrado Bongiorno et al. · Materials Science in Semiconductor Processing · 2018 · 129 citations · Full text

Engineering, Defects Reduction, 3C-sic Growth +17

Heteroepitaxy of 3C-SiC on different on-axis oriented silicon substrates

Ruggero Anzalone, Giuseppe D’Arrigo, Corrado Bongiorno et al. · Journal of Applied Physics · 2009 · 60 citations

Materials Science, Engineering, Crystalline Defects +14

Advanced Residual Stress Analysis and FEM Simulation on Heteroepitaxial 3C–SiC for MEMS Application

Ruggero Anzalone, Giuseppe D’Arrigo, Massimo Camarda et al. · Journal of Microelectromechanical Systems · 2011 · 51 citations

Engineering, Residual Stress Analysis, Mechanical Engineering +20

Structural defects in (100) 3C-SiC heteroepitaxy: Influence of the buffer layer morphology on generation and propagation of stacking faults and microtwins

Christopher L. Frewin, Corrado Bongiorno, Ruggero Anzalone et al. · Diamond and Related Materials · 2009 · 49 citations

Materials Science, Buffer Layer Morphology, 3C-sic Heteroepitaxy +8

3C-SiC Film Growth on Si Substrates

Andrea Severino, Christopher Locke, Ruggero Anzalone et al. · ECS Transactions · 2011 · 42 citations

Materials Engineering, Materials Science, Epitaxial Growth +13