Concepedia

Massimo Camarda

MC

45

Publications

1.4K

Citations

22

H-Index

2003

Active since

Affiliations

Institute for Microelectronics and Microsystems(Current)

University of Catania

Istituto Nazionale di Fisica Nucleare, Sezione di Catania

STMicroelectronics (Italy)

Paul Scherrer Institute

Massimo Camarda is an author at Institute for Microelectronics and Microsystems specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsElectrical EngineeringMaterials EngineeringMicrostructureNanoelectronicsMicroelectronicsThin Films

Publications per year

2003–2024

45

Publications

45

SiCILIA—Silicon Carbide Detectors for Intense Luminosity Investigations and Applications

S. Tudisco, Francesco La Via, C. Agodi et al. · Sensors · 2018 · 263 citations · Full text

Electrical Engineering, Engineering, Nuclear Physics +14

Mechanisms of growth and defect properties of epitaxial SiC

Francesco La Via, Massimo Camarda, Antonino La Magna · Applied Physics Reviews · 2014 · 140 citations

Materials Science, Materials Engineering, Electrical Engineering +12

High-quality 6inch (111) 3C-SiC films grown on off-axis (111) Si substrates

Corrado Bongiorno, Nicolò Piluso, M. Italia et al. · Thin Solid Films · 2009 · 66 citations

Materials Science, Materials Engineering, Engineering +9

Advanced Residual Stress Analysis and FEM Simulation on Heteroepitaxial 3C–SiC for MEMS Application

Ruggero Anzalone, Giuseppe D’Arrigo, Massimo Camarda et al. · Journal of Microelectromechanical Systems · 2011 · 51 citations

Engineering, Residual Stress Analysis, Mechanical Engineering +20

A kinetic Monte Carlo method on super-lattices for the study of the defect formation in the growth of close packed structures

Massimo Camarda, Antonino La Magna, Francesco La Via · Journal of Computational Physics · 2007 · 48 citations

Materials Science, Engineering, Physics +11

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