Massimo Camarda

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Publications

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1.5K

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Active since

2003

Affiliations

Institute for Microelectronics and Microsystems(Current)

University of Catania

Istituto Nazionale di Fisica Nucleare, Sezione di Catania

STMicroelectronics (Italy)

Paul Scherrer Institute

Massimo Camarda is an author at Institute for Microelectronics and Microsystems specializing in materials science, natural sciences, and silicon carbide (sic) materials.

ORCID

Publications per year

2003–2024

Publications

SiCILIA—Silicon Carbide Detectors for Intense Luminosity Investigations and Applications

S. Tudisco, Francesco La Via, C. Agodi et al. · Sensors · 2018 · 266 citations · Full text

Engineering, Nuclear Engineering, Physics +17

Mechanisms of growth and defect properties of epitaxial SiC

Francesco La Via, Massimo Camarda, Antonino La Magna · Applied Physics Reviews · 2014 · 152 citations

Engineering, Materials Engineering, Materials Science +17

High-quality 6inch (111) 3C-SiC films grown on off-axis (111) Si substrates

Corrado Bongiorno, Nicolò Piluso, M. Italia et al. · Thin Solid Films · 2009 · 66 citations

Engineering, Materials Engineering, Materials Science +14

Advanced Residual Stress Analysis and FEM Simulation on Heteroepitaxial 3C–SiC for MEMS Application

Ruggero Anzalone, Giuseppe D’Arrigo, Massimo Camarda et al. · Journal of Microelectromechanical Systems · 2011 · 53 citations

Engineering, Materials Engineering, Materials Science +17

A kinetic Monte Carlo method on super-lattices for the study of the defect formation in the growth of close packed structures

Massimo Camarda, Antonino La Magna, Francesco La Via · Journal of Computational Physics · 2007 · 50 citations

Natural Sciences, Materials Science, Physics +16

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