Christopher Locke

Advanced Residual Stress Analysis and FEM Simulation on Heteroepitaxial 3C–SiC for MEMS Application

Ruggero Anzalone, Giuseppe D’Arrigo, Massimo Camarda et al. · Journal of Microelectromechanical Systems · 2011 · 51 citations

Engineering, Residual Stress Analysis, Mechanical Engineering +20

3C-SiC Film Growth on Si Substrates

Andrea Severino, Christopher Locke, Ruggero Anzalone et al. · ECS Transactions · 2011 · 42 citations

Materials Engineering, Materials Science, Epitaxial Growth +13

Single-crystal cubic silicon carbide: An in vivo biocompatible semiconductor for brain machine interface devices

Christopher L. Frewin, Christopher Locke, Stephen E. Saddow et al. · 2011 · 34 citations

Engineering, Neuromodulation Therapies, Biomedical Engineering +19

Atomic layer deposition of Pb(Zr,Ti)Ox on 4H-SiC for metal-ferroelectric-insulator-semiconductor diodes

Feng Zhang, Ya-Chuan Perng, Ju Hyeon Choi et al. · Journal of Applied Physics · 2011 · 29 citations

Engineering, Thin Film Process Technology, Atomic Layer +17

3C-SiC Films on Si for MEMS Applications: Mechanical Properties

Christopher Locke, Grygoriy Kravchenko, Patrick Waters et al. · Materials science forum · 2009 · 26 citations

Engineering, Mechanical Engineering, Material Innovation +17