Bert Du Bois

<title>Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal</title>

Ann Witvrouw, Bert Du Bois, Piet De Moor et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 98 citations

Engineering, Materials Engineering, Materials Science +17

Low Loss CMOS-Compatible PECVD Silicon Nitride Waveguides and Grating Couplers for Blue Light Optogenetic Applications

Luis Hoffman, Ananth Z. Subramanian, Philippe Hélin et al. · IEEE photonics journal · 2016 · 40 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Highly reliable CMOS-integrated 11MPixel SiGe-based micro-mirror arrays for high-end industrial applications

L. Haspeslagh, Jeroen De Coster, Olalla Varela Pedreira et al. · 2008 · 31 citations

Engineering, Electrical Engineering, Microelectronics +16

Processing of MEMS gyroscopes on top of CMOS ICs

Ann Witvrouw, Ankit Nalin Mehta, Agnes Verbist et al. · 2005 · 28 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +12

CMOS-integrated poly-SiGe cantilevers with read/write system for probe storage device

S. Severi, J. Heck, T.-K. Chou et al. · TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference · 2009 · 21 citations

Engineering, Electrical Engineering, Mechanical Engineering +16