Chris Spence

Patterning control strategies for minimum edge placement error in logic devices

Jan Mulkens, M. M. Hanna, Bram Slachter et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 46 citations

Engineering, Computer Engineering, Manufacturing Engineering +14

Modeling and simulation of a deep-ultraviolet acid hardening resist

Richard A. Ferguson, John M. Hutchinson, Chris Spence et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 29 citations

Engineering, Materials Engineering, Materials Science +14

Full-chip lithography simulation and design analysis: how OPC is changing IC design

Chris Spence · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 19 citations

Engineering, Computer Engineering, Manufacturing Engineering +15

Mask data volume: historical perspective and future requirements

Chris Spence, Scott Goad, Peter Buck et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 17 citations

Engineering, Computer Engineering, Computer Science +17

Investigation of the exposure and bake of a positive acting resist with chemical amplification

Richard A. Ferguson, Chris Spence, Elsa Reichmanis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 16 citations

Natural Sciences, Chemical Engineering, Chemistry +13