Concepedia

M. Fissel

MF

Statistics

Publications

3

Citations

100

H-Index

3

Active since

1987

Affiliations

Drexel University(Current)

M. Fissel is an author at Drexel University specializing in engineering, applied physics, and surface science.

Top concepts

Publications per year

1987–2001

3

Publications

3

Growth and properties of TiN and TiOxNy diffusion barriers in silicon on sapphire integrated circuits

N. Kumar, M. Fissel, Kambiz Pourrezaei et al. · Thin Solid Films · 1987 · 60 citations

, , +9

Growth and properties of radio frequency reactively sputtered titanium nitride thin films

N. Kumar, Kambiz Pourrezaei, M. Fissel et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 28 citations

, , +13

<i>In situ</i> physical vapor deposition of ionized Ti and TiN thin films using hollow cathode magnetron plasma source

G. C. D’Couto, G. Tkach, K. A. Ashtiani et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 12 citations

, , +16

1–3 of 3