N. Kumar

Transmission electron microscopy studies of brown and golden titanium nitride thin films as diffusion barriers in very large scale integrated circuits

N. Kumar, J. T. McGinn, Kambiz Pourrezaei et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 65 citations

Materials Science, Semiconductors, Engineering +14

Growth and properties of TiN and TiOxNy diffusion barriers in silicon on sapphire integrated circuits

N. Kumar, M. Fissel, Kambiz Pourrezaei et al. · Thin Solid Films · 1987 · 60 citations

Materials Engineering, Engineering, Physics +9

Failure mechanisms of TiN thin film diffusion barriers

N. Kumar, Kambiz Pourrezaei, Boon Y. Lee et al. · Thin Solid Films · 1988 · 44 citations

Materials Science, Engineering, Diffusion Resistance +5

Growth and properties of radio frequency reactively sputtered titanium nitride thin films

N. Kumar, Kambiz Pourrezaei, M. Fissel et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 28 citations

Materials Science, Material Analysis, Engineering +13