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Growth and properties of TiN and TiOxNy diffusion barriers in silicon on sapphire integrated circuits

Materials EngineeringEngineeringPhysicsNanoelectronicsApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationIntegrated CircuitsTioxny Diffusion BarriersSilicon On InsulatorMicroelectronicsSemiconductor Device