Concepedia

M. Li

ML

2

Publications

67

Citations

2

H-Index

2010

Active since

Affiliations

University of California, Berkeley(Current)

Lam Research (United States)

University of Maryland, College Park

M. Li is an author at University of California, Berkeley specializing in optical properties, optical materials, and engineering.

Top concepts

Publications per year

2010–2010

2

Publications

2

Photoresist modifications by plasma vacuum ultraviolet radiation: The role of polymer structure and plasma chemistry

F. Weilnboeck, Robert L. Bruce, Sebastian Engelmann et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 47 citations

, , +21

Electron, ion and vacuum ultraviolet photon effects in 193 nm photoresist surface roughening

T.-Y. Chung, D. Nest, David B. Graves et al. · Journal of Physics D Applied Physics · 2010 · 20 citations

, , +21

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