Marc Hennemeyer

Surface hydrophilization of SU‐8 by plasma and wet chemical processes

Tanja Drobek, Alexander M. Gigler, Marc Hennemeyer et al. · Surface and Interface Analysis · 2010 · 49 citations

Natural Sciences, Materials Engineering, Materials Science +17

Cell proliferation assays on plasma activated SU-8

Marc Hennemeyer, Sandra Kerstan, Katrin Schürzinger et al. · Microelectronic Engineering · 2008 · 42 citations

Life Sciences, Cell Biology, Oncology +5

Cantilever Micro-rheometer for the Characterization of Sugar Solutions

Marc Hennemeyer, Stefan Burghardt, Robert W. Stark · Sensors · 2008 · 41 citations · Full text

Engineering, Food Science, Microelectromechanical Systems +14

Mask aligner lithography simulation – From lithography simulation to process validation

Kristian Motzek, Stefan Partel, Arianna Bramati et al. · Microelectronic Engineering · 2012 · 13 citations

Engineering, Manufacturing Engineering, Manufacturing Processes +11

Optimization of illumination pupils and mask structures for proximity printing

Kristian Motzek, A. Bich, Andreas Erdmann et al. · Microelectronic Engineering · 2009 · 11 citations

Engineering, Manufacturing Engineering, Additive Manufacturing +8