Organic and inorganic analysis with laser microprobe mass spectrometry. Part I: Instrumentation and methodology

Luc Van Vaeck, Herbert Struyf, W. Van Roy, +1

Mass Spectrometry Reviews

Organic GeochemistryChemical EngineeringEngineeringAnalytical InstrumentationNatural Sciences +7

Capturing Wetting States in Nanopatterned Silicon

XiuMei Xu, Guy Vereecke, Chang Chen, +13

ACS Nano

EngineeringNanostructured SurfaceWettingSuper-hydrophobic SurfaceSilicon On Insulator +15

Damascene Benchmark of Ru, Co and Cu in Scaled Dimensions

Marleen H. van der Veen, N. Heyler, Olalla Varela Pedreira, +8

EngineeringDamascene BenchmarkGeologic Time ScaleInterconnect (Integrated Circuits)Alternative Metals Ru +15

Double patterning scheme for sub-0.25 k1 single damascene structures at NA=0.75, λ=193nm

Mireille Maenhoudt, Janko Versluijs, Herbert Struyf, +2

Optical Microlithography XVIII

Minimum PitchElectrical EngineeringDouble Patterning SchemeEngineeringElectron-beam Lithography +8

Organic and inorganic analysis with laser microprobe mass spectrometry. Part II: Applications

Luc Van Vaeck, Herbert Struyf, W. Van Roy, +1

Mass Spectrometry Reviews

Organic GeochemistryChemical EngineeringEngineeringEnvironmental Analytical ChemistryMass Spectrometry +6

Chemical Mechanical Polishing of Chemical Vapor Deposited Co Films with Minimal Corrosion in the Cu/Co/Mn/SiCOH Patterned Structures

K. V. Sagi, Lieve Teugels, Marleen H. van der Veen, +3

ECS Journal of Solid State Science and Technology

EngineeringChemistryMineral ProcessingChemical EngineeringCorrosion +16

Enhancement of cavitation activity and particle removal with pulsed high frequency ultrasound and supersaturation

Marc Hauptmann, F. Frederickx, Herbert Struyf, +5

Ultrasonics Sonochemistry

CavitationCavitating FlowParticle RemovalEngineeringPower Ultrasound +8

Development of a laser microprobe fourier transform mass spectrometer with external ion source

Luc Van Vaeck, W. Van Roy, Herbert Struyf, +2

Rapid Communications in Mass Spectrometry

Clinical Mass SpectrometryBiological Mass SpectrometryChemistrySpectrochemical AnalysisAnalytical Instrumentation +15

Removal of Plasma-Modified Low-k Layer Using Dilute HF: Influence of Concentration

Quoc Toan Le, Mikhaı̈l R. Baklanov, E. Kesters, +5

Electrochemical and Solid-State Letters

Towards an understanding and control of cavitation activity in 1 MHz ultrasound fields

Marc Hauptmann, Herbert Struyf, Paul Mertens, +4

Ultrasonics Sonochemistry

Biomedical AcousticsCavitationMedical UltrasoundEngineeringCavitating Flow +8