Concepedia
Author
N. Heyler
Also Known As
1
Publications
58
Citations
H-Index
9
Concepts
All Affiliations
2
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5
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All Concepts
Damascene Benchmark of Ru, Co and Cu in Scaled Dimensions
Marleen H. van der Veen, N. Heyler, Olalla Varela Pedreira, +8
EngineeringDamascene BenchmarkGeologic Time ScaleInterconnect (Integrated Circuits)Alternative Metals Ru +15
2018
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